The fabrication process of MEMS high-temperature pressure sensors includes steps such as photolithography
The application of MEMS high-temperature pressure sensors is very extensive,
Strain gauge pressure sensor is a common pressure measuring device used to measure the strain changes caused by the force on an object
Bridge circuit: Strain gauges usually exist in the form of resistors
Signal conditioning circuit: The signal conditioning circuit amplifies,
The output signal can be connected to external devices,